, 194156, -, . , 27, / 83
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.
, .
, .
C 4585 22.11.2002.
, :
- (Si, Ge, SiGe, GaAs, InP, )
- SiC, AlN, GaN
- - (Si, SiC, SiGe) 35
- InGaAlN
:
- CVD-Module:
- CGSim:
- Virtual Reactor: SiC, AlN, GaN
- SiLENSe, SELES, SLED: